A novel 3-dimentional ultra high precision positioning platform for micro machining cutting tools

Ultra-high precision machining is proposed by externally actuating the work piece in linear motions in the X-Y plane and linear motion in the Z-axis. To solve the problems in the machining process such as nonlinearity and low repeatability positioning accuracy of machining tools in a larger scale, a novel platform for cutting tools in micro machining based on electrostatic linear micromotors and piezoelectric stack actuator system is presented.